Ozone Doesn’t Work? You’re Doing It Wrong.
The use of ozone in semiconductor wet processing surface preparation has gained new momentum as fabs pursue advanced cleans and







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The use of ozone in semiconductor wet processing surface preparation has gained new momentum as fabs pursue advanced cleans and
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The use of ozone in semiconductor wet processing surface preparation has gained new momentum as fabs pursue advanced cleans and strip steps that reduce chemical waste without compromising performance. In theory, ozone’s oxidation potential (2.07 V) makes it one of the strongest practical