The SHELLBACK Torrentsp, Automated Spray Batch Tool for wafers up to 300mm
The 2, 3, and 4 chamber Torrentsp, built based on the Semitool Cintillio platform, is an automated batch system that integrates industrial automation. The use of Cintillio process module ensures existing Spectrum and Magnum users have a seamless process transfer from these older platforms. The main drivers for automation at 200mm and above is to reduce manual operator intervention and dependency. This provides ergonomic relief to operators, fulfills the automation requirements of SMIF and FOUP operations, and has the added advantage of automated wafer control. The Torrentsp handling solution is well-suited for those manufacturers who require an automated wet processing mini-environment in a compact footprint, including power semiconductor, CMOS IC, Advanced Packaging, MEMS, and LED applications. For more information, click on one of our product pages buttons below.