AMAT P5000 Upgrades

Extend Equipment Life

Extend Your P5000 System Life with Key Upgrades

The iconic P5000 CVD and Etch system remains an industry favorite for its versatility and cost of ownership. We provide critical upgrades to address obsolescence issues and improve tool usefulness as the product line owner of this iconic line. Contact us to learn more!

Looking to Add a Refurbished System?

Available Core Trade-in Credit!

High Reliability Robot

Address Robot Reliability

  • Production proven upgrade, MTBF >5 years without maintenance
  • Addresses robot repeatability with 5x improvement in placement accuracy
  • Direct Plug-and-play retrofit for P5000 Phase III robot
  • Improved rotary vacuum seal addresses a main source of transport leak rate
  • Core trade in credit

Accuracy

Robot Type Rotation Extension Leak Up
AMAT Phase III Robot
0.2~0.6 deg/step
0.5~3.0 mm/step
<10 mTorr/min
High Reliability Robot
0.1~0.4 deg/step
0.3~0.5 mm/step
< 3 mTorr/min

Repeatability

Robot Type Rotation Extension Leak Up
AMAT Phase III Robot
+/- 1.0 deg
+/- 1.0 mm
<10 mTorr/min
High Reliability Robot
+/- 0.2 deg
+/- 0.2 mm
< 3 mTorr/min

Flat Panel Replacement for CRT Display Screen + Lightpen

Address CRT Screen Obsolescence

  • Larger screen size (17 inch)
  • Reduced power consumption
  • Supports two modes: traditional point+click stylus or touchscreen stylus
  • Standard compatible mounting options – wall, arm-mounted, tabletop

RAID Replacement for SCSI HDD

Address Small-format SCSI Obsolescence

  • Small format SCSI HDD are very difficult to find, costly with poor reliability
  • RAID 1 provides automatic drive duplication in real time
    • Redundancy
    • Hot swap upon failure
    • Ability to create spare copy for storage off tool or transfer to another tool
  • Direct retrofit for AMAT P5000 / Centura – no special hardware needed.
  • Accepts available, low-cost laptop style 3.5 inch HDD modules

Compact Flash Floppy Drive Replacement

Eliminate your Floppy Drive!

  • Remove the need for unreliable, hard to find floppy disks. 
  • Replace with faster, more reliable compact flash technology
  • Upgrade includes 6 CF cards
  • Direct retrofit for P5000 / Centura
  • No special hardware needed
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