Batch Spray Clean Etch
SHELLBACK is now the new product line owner of the iconic MERCURYTM+ product line. MERCURYTM+ provides proven high speed spray batch processing for 100 to 200mm wafers, perfect for fabs looking for high throughput, low cost-of ownership, and easy size change capabilities. The speed and versatility of MERCURY+ makes it ideal for emerging markets such as Power Devices, MEMS & Sensors, and many more.
MERCURY+ comes with the latest software enhancements to keep your system running for years to come. The same upgrades are also available for MERCURY users.