MERCURY+
Batch Spray Clean Etch
M+
SHELLBACK is now the new product line owner of the iconic FSI MERCURY™ / MERCURY™+ product line. MERCURY+ batch spray clean etch systems provide proven high speed spray batch processing for 100 to 200mm wafers, perfect for fabs looking for high throughput, low cost-of ownership, and easy size change capabilities. The speed and versatility of MERCURY+ makes it ideal for emerging markets such as Power Devices, MEMS & Sensors, and many more.
MERCURY+ comes with the latest software enhancements to keep your system running for years to come. The same upgrades are also available for FSI MERCURY users.
MERCURY+ Batch Spray System
Hi Throughput / Low CoO Clean . Etch . Resist Strip
Also See Automated Loading Systems
Process Applications
- SPM, dHF, SC1, SC2 cleans
- Post-etch and post-ash cleans
- Aqueous photoresist strip applications
- Wet etch/strip of metal films for silicide
- BEOL, Post cleans using DSP, DSP+
Benefits
- High throughput batch cleaning
- Reliable, low cost of ownership
- Proven platform for 100mm to 200mm
- Flexible chemistries