MERCURY+
Batch Spray Clean Etch

M+

SHELLBACK is now the new product line owner of the iconic FSI MERCURY™ /  MERCURY™+ product line. MERCURY+ batch spray clean etch systems provide proven high speed spray batch processing for 100 to 200mm wafers, perfect for fabs looking for high throughput, low cost-of ownership, and easy size change capabilities. The speed and versatility of MERCURY+ makes it ideal for emerging markets such as Power Devices, MEMS & Sensors, and many more.

MERCURY+ comes with the latest software enhancements to keep your system running for years to come. The same upgrades are also available for FSI MERCURY users.

MERCURY+ Batch Spray System

Hi Throughput / Low CoO Clean . Etch . Resist Strip

Also See Automated Loading Systems

Process Applications

Benefits

CONTACT SHELLBACK

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