Close this search box.

Batch Spray Systems

Industry Enabling Technology

Capable of meeting any wet application demand, SHELLBACK SEMITOOL spray batch products break new technological ground in 25/50 wafer batch process. SHELLBACK’s versatile wet-chemical processing batch spray family was conceptualized with end users in mind. Spray Acid Tool (SAT), Spray Solvent Tool (SST) and ECO-Clean Tools feature convenient side access, which makes routine maintenance checks both safe and user friendly. SHELLBACK’s innovative and proprietary Enhanced Spray Technology, featuring up to six rows of nozzles, ensures high throughput and reliable wafer surface wetting with chemical mixtures.

With the smallest footprint among similar equipment, SHELLBACK SEMITOOL batch spray products not only save fab floor space, but also enable high up-time and low cost of ownership. SHELLBACK also stocks a wide variety of SEMITOOL batch spray spare parts for current an prior models.

Based on our proprietary SEMITOOL IP, SHELLBACK offers Batch Spray ECO-Clean Tools, Spray Acid and Spray Solvent Tools, as well as our Spin Rinse Dryer and STORM box/cassette/FOUP/SMIF washer all with industry-proven design technology. Acquired by OEM Group in May 2011 from Applied Materials, SEMITOOL batch spray systems are a major piece of SHELLBACK’s portfolio.

New Systems

Semitool Spray Solvent Tool (SST) Torrent

TORRENT Spray Solvent

Semitool Spray Acid Tool (SAT) Torrent

TORRENT Spray Acid

Semitool ECO-Clean Batch Spray Tool


Semitool Spray Acid Tool (SAT) Torrent

HF Vapor Tool

Upgrades for Your
Existing Systems

Semitool Spin Rinse Dryer

Spin Rinse Dryer

Semitool 2 Chamber Torrent SP

TORRENTsp Automated


Scroll to Top