Batch Spray Systems
Industry Enabling Technology
Capable of meeting any wet application demand, SHELLBACK SEMITOOL spray batch products break new technological ground in 25/50 wafer batch process. SHELLBACK’s versatile wet-chemical processing batch spray family was conceptualized with end users in mind. Spray Acid Tool (SAT), Spray Solvent Tool (SST) and ECO-Clean Tools feature convenient side access, which makes routine maintenance checks both safe and user friendly. SHELLBACK’s innovative and proprietary Enhanced Spray Technology, featuring up to six rows of nozzles, ensures high throughput and reliable wafer surface wetting with chemical mixtures.
With the smallest footprint among similar equipment, SHELLBACK SEMITOOL batch spray products not only save fab floor space, but also enable high up-time and low cost of ownership. SHELLBACK also stocks a wide variety of SEMITOOL batch spray spare parts for current an prior models.