SEMITOOL TORRENT
Eco-Clean Spray Ozone Tool
SOT
SHELLBACK’s SEMITOOL TORRENT ECO-Clean™ Spray Ozone Tool (SOT) offers field-proven technology to provide high throughput capability with dramatically lower chemical consumption and ownership costs. Our award-winning Hydrozone and Flurozone processes offer an economical alternative to traditional H2SO4/H2O2 use to provide fast, affordable and efficient photo resist strip, photo rework, or organic contamination removal. SEMITOOL pioneered ozone batch cleaning in 2009 with its award winning introduction. This proven technology provides a long history of performance, so you don’t have to worry about creating & testing inexperienced solutions.
SEMITOOL TORRENT ECO-Clean Ozone Tool (SOT)
Batch Spray System
Process Applications
- Photoresist strip
- Post ash clean
- Post etch residue clean
- Surface preparation FEOL and BEOL
Dramatic Cost of Ownership Reduction
- Zero to 7ml chemical consumption/run
- Reduce DIW consumption up to 85%
- Low exhaust and facilities requirements
- Low waste
- Reduces cost per wafer
- Improved cycle times
Award-winning Ozone Process
Proven
Batch Spray
Technology
Features:
Chamber
- Enhanced Spray Technology
- On-Axis design
- Uniform boundary layer
- Uniform, repeatable process
- Flexible process
- High throughput
- Single chamber 25 or 50 wafer loads
- Dual chamber 25 or 50 wafer loads
- End point detection available
- Sealed chamber isolates operator from chemistry
- Safe operation
Controlled injection of chemicals
- Fill vessels deliver dilute chemical
- NH4OH, HCL, HF
Software
- Windows 10
- Web based HMI
- Recipe Editor: Excel View & Remote upload
- SEC/GEM
- Smart Parts: Advanced predictive analytics