SEMITOOL TORRENT
Eco-Clean Spray Ozone Tool

SOT

SHELLBACK’s SEMITOOL TORRENT ECO-Clean™ Spray Ozone Tool (SOT) offers field-proven technology to provide high throughput capability with dramatically lower chemical consumption and ownership costs. Our award-winning Hydrozone and Flurozone processes offer an economical alternative to traditional H2SO4/H2O2 use to provide fast, affordable and efficient photo resist strip, photo rework, or organic contamination removal. SEMITOOL pioneered ozone batch cleaning in 2009 with its award winning introduction. This proven technology provides a long history of performance, so you don’t have to worry about creating & testing inexperienced solutions.

TORRENT SAT SOT

SEMITOOL TORRENT ECO-Clean Ozone Tool (SOT)
Batch Spray System

Process Applications

Dramatic Cost of Ownership Reduction

Award-winning Ozone Process

  • SC1, SC2, SPM, HF replacement

  • HydrOzone™

    Heated DIW+O3

  • HydrOzone+

    Heated DIW+NH4OH+O3

  • FluorOzone™

    Heated DIW+HF+O3

  • FluorOzone+

    Heated DIW+HF+O3 + HCL/DIW

Proven
Batch Spray
Technology

Features:

Chamber

Controlled injection of chemicals

Software

CONTACT SHELLBACK

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