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SEMITOOL TORRENT
Eco-Clean Spray Ozone Tool

SOT

SHELLBACK’s SEMITOOL TORRENT ECO-Clean Spray Ozone Tool (SOT) offers field-proven hardware together with industrial standard components. High throughput, low chemical consumption and SHELLBACK’s proven process performance mean low cost of ownership. Patented Hydrozone and Flurozone processes offer an economical alternative to the traditional H2SO4/H2O2 process to make photo resist strip, photo rework, or organic contamination removal fast, affordable and efficient.

TORRENT SAT SOT

SEMITOOL TORRENT ECO-Clean Ozone Tool (SOT)
Batch Spray System

Process Applications

Dramatic Cost of Ownership Reduction

Award-winning Ozone Process

  • SC1, SC2, SPM, HF replacement

  • HydrOzone

    Heated DIW+O3

  • HydrOzone+

    Heated DIW+NH4OH+O3

  • FluorOzone

    Heated DIW+HF+O3

  • FluorOzone+

    Heated DIW+HF+O3 + HCL/DIW

Proven
Batch Spray
Technology

Features:

Chamber

Controlled injection of chemicals

Software

CONTACT SHELLBACK

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