Semitool Torrent ECO-Clean

The Torrent ECO-Clean delivers the SHELLBACK patented, award winning, Hydrozone and Hydrozone+, Fluorozone and Fluorozone+ processes.  The ECO-Clean platform with its small footprint, 50-wafer load, Teflon chamber / rotor and integral Ozone generator, has the most space efficient form-factor of any batch spray or immersion tool in the industry today.

Semitool ECO-Clean Batch Spray Tool

Semitool Torrent ECO-Strip Spray Batch Tool

Process Applications:

Award-winning Ozone Processes



Controlled injection of chemicals


Dramatic cost of ownership reduction


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