Semitool Torrent Spray Ozone Tool (SOT)
SHELLBACK’s Semitool Torrent Spray Ozone Tool (SOT) offers field-proven hardware together with industrial standard components. High throughput, low chemical consumption and SHELLBACK’s proven process performance mean low cost of ownership. Patented Hydrozone and Flurozone processes offer an economical alternative to the traditional H2SO4/H2O2 process to make photo resist strip, photo rework, or organic contamination removal fast, affordable and efficient.
Semitool Torrent Spray Ozone Tool (SOT) Spray Batch System
Process Applications:
- Photoresist strip
- Post ash clean
- Post etch clean
- Surface preparation FEOL and BEOL
Award-winning Ozone Processes
- SC1, SC2, SPM, HF replacement
- HydrOzone
- HydrOzone+
- FluorOzone
- FluorOzone+
Features:
Chamber
- Enhanced Spray Technology
- On-Axis design
- Uniform boundary layer
- Uniform, repeatable process
- High throughput
- Single chamber 25 or 50 wafer loads
- Dual chamber 25 or 50 wafer loads
- Sealed chamber isolates operator from chemistry
- Safe operation
Controlled injection of chemicals
- Fill vessels deliver dilute chemical
- NH4OH, HCL, HF
Software
- Windows 10
- Web based HMI
- Recipe Editor: Excel View & Remote upload
- SEC/GEM
- Smart Parts: Advanced predictive analytics
Dramatic cost of ownership reduction
- Zero to 7ml chemical consumption/run
- Reduce DIW consumption up to 85%
- Low exhaust and facilities requirements
- Low waste
- Reduces cost per wafer
- Improved cycle times