Semitool Torrent Spray Ozone Tool (SOT)

SHELLBACK’s Semitool Torrent Spray Ozone Tool (SOT) offers field-proven hardware together with industrial standard components. High throughput, low chemical consumption and SHELLBACK’s proven process performance mean low cost of ownership. Patented Hydrozone and Flurozone processes offer an economical alternative to the traditional H2SO4/H2O2 process to make photo resist strip, photo rework, or organic contamination removal fast, affordable and efficient.

Semitool ECO-Clean Batch Spray Tool

Semitool Torrent Spray Ozone Tool (SOT) Spray Batch System

Process Applications:

Award-winning Ozone Processes

Features:

Chamber

Controlled injection of chemicals

Software

Dramatic cost of ownership reduction

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