Semitool Torrent Spray Ozone Tool (SOT)

SHELLBACK’s Semitool Torrent Spray Acid Tool (SOT) is the world’s most advanced spray batch tool for semiconductor wet etch and cleans processes and comes in two models: The ECO-Clean and The ECO-Strip systems. The Torrent ECO-Clean, with Teflon chamber/rotor, delivers Hydrozone and Hydrozone+, Fluorozone and Fluorozone+ processes. The ECO-Strip, with a stainless steel chamber, delivers Hydrozone and Hydrozone+ processes. With it’s small footprint, both models have a 50-wafer load, an integral Ozone generator, and the most space efficient form-factor of any batch spray or immersion tool in the industry today.

Semitool ECO-Clean Batch Spray Tool

Semitool Torrent ECO-Clean Spray Batch Tool

Process Applications:

Award-winning Ozone Processes

Features:

Chamber

Controlled injection of chemicals

Software

Dramatic cost of ownership reduction

Semitool Torrent ECO-Strip Spray Batch Tool

Process Applications:

Award-winning Ozone Processes

Features:

Chamber

Controlled injection of chemicals

Software

Dramatic cost of ownership reduction

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