Varian Ion Implant
The Varian implant systems are proven platforms with a wide range of processes utilized by a large global install base. More than a production tool, the Varian systems will be an implant contributor to your production line for years to come.
Varian 350D and XP Series Ion Implant Systems
SHELLBACK Semiconductor Technology owns all IP and product stewardship for the following Varian Products:
- Mid Current: A200, DF/CF Series, 350D, 350 DE, 300 XP
- High Current: 80-10, 120-10, 160-10, 200-10, 80XP, 120XP, 160XP
- High Frequency: 400/500 XP, G1500, G1510
Services include:
- Tool sales
- Upgrades
- Parts Supply: Consumable & Non Consumable
- Repair Service: Remedial & Contract Support
- Exchange & Refurbishments: Disks, Power Supplies
- Tool Moves & Installations
- Refurbishments: In-situ Overhauls
- Engineering & Technical Support
- Single-wafer processing
- Accel Columns
Applications:
- Power Device
- Memory
- Logic
- Analog
- Discrete
- MEMS
Features:
- Mid-current implanter
- Single-wafer / Single-end Station
- Vertical wafer handling
- Photoresist process capability
- Max beam currents: 1.5 mA
- Wafer Sizes: 100mm, 125mm, and 150mm
Benefits:
- Optimized for maximum dose uniformity and repeatability
- Reduced particulate contamination
- Production-proven solution
- Industry lowest CoO
- High Throughput