SVG Parts
The Most Comprehensive Inventory
of SVG Track System Parts Worldwide

SVG 86, SVG 88, SVG 90-S/SE System Parts
New 112-005 Motors, 112-005EXL Motors
Product Line Owner. Product Line Expert.
Need an SVG part? We own the IP.
As the owner of the SVG 86, 88 and 90-S/SE series product lines, Rite Track has a vast inventory of new and certified used parts to keep your SVG system running for years to come. This includes NEW 112-005 and 112-067 motors, critical for SVG 8600 and SVG 8800 system operation. If we don’t currently have your part in stock, we own the SVG intellectual property to get it made. In many cases we have already designed functional replacements for obsolete parts through our dedicated engineering staff and product managers.
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SVG 86 System Parts
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SVG 88/88e System Parts
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SVG 90-S/SE System Parts

Request a RITE TRACK Parts Quote
Web Form
Email / Phone
Region | Phone | |
---|---|---|
America | Parts@ritetrack.com | +1 513 645-8700 |
Europe | EuroSpares@ritetrack.com | +31 495 545 817 |
Asia | AsiaSpares@ritetrack.com | +65 6484 3421 |
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Recommended Parts List for SVG
Edit Content
Area | Part No. | DESCRIPTION | QTY |
---|---|---|---|
INDEXER | QUANTITY ARE FOR 4 ASSEMBLIES | ||
112-077 | INDEXER MOTOR | 2 | |
100-032 | CAP, WAFER SENSOR (IF APPLICABLE) | 2 | |
99-18266-02 | OPTICAL WAFER SENSOR (IF APPLICABLE) | 2 | |
99-16310-02 | HI TORQUE INDEXER HARNESS | 2 | |
99-73092-01 | HI TORQUE INDEXER PCB (REPLACES 99-80039-07) | 2 | |
HOT PLATE OVEN | QUANTITIES ARE PER ASSEMBLY | ||
109-014 | VACUUM SWITCH | 1 | |
215-200 | FLEXIBLE COUPLER | 1 | |
70013-01 | 115VAC 700 WATT HEATER ELEMENT (IF APPLICABLE) | 1 | |
206-247 | TEFLON FERRULE | 2 | |
215-200 | COUPLING MOTOR | 1 | |
99-04089 | THERMOCOUPLE ASSY. (FOR USE WITH BARBER COLEMAN TEMP. CONTROLLERS ONLY) | 1 | |
99-43896-01 | RTD. ASSY. (FOR USE WITH WATLOW TEMP. CONTROLLERS ONLY) | 1 | |
99-80158-01 | SINGLE SENSOR PCB | 1 | |
COATER (SUB MICRON) | QUANTITIES ARE PER ASSEMBLY | ||
114-020 | SOLENOID VALVE | 1 | |
99-70265-01 | SOLENOID VALVE | 1 | |
99-70265-02 | SOLENOID VALVE | 2 | |
109-014 | VACUUM SWITCH | 1 | |
109-125 | CCR SWITCH ACTUATOR | 1 | |
109-126 | CCR SWITCH | 1 | |
109-148 | MAGNETIC REED SWITCH | 1 | |
202-303 | KALREZ O-RING | 3 | |
202-283 | TEFLON O-RING | 1 | |
06041-01 | CATCH CUP BOTTOM SECTION | 1 | |
11959-01 | CATCH CUP INSERT | 1 | |
17215-01 | CATCH CUP LID (FOR VAPOR TIP BATH SYSTEMS) | 1 | |
17215-02 | CATCH CUP LID (FOR NON-VAPOR TIP BATH SYSTEMS) | 1 | |
114-006 | VACUUM SOLENOID | 1 | |
203-062 | SPINDLE DRIVE LIFT CYLINDER | 1 | |
203-071 | DISPENSE ARM AIR CYLINDER | 1 | |
99-80158-01 | SINGLE SENSOR PCB | 3 | |
99-80089-06 | FLAT FINDER SENSOR PCB (IF APPLICABLE 150mm AND 125mm WAFERS ONLY) | 2 | |
99-18427-01 | FLAT FINDER RIBBON CABLE ASSEMBLY | 1 | |
99-19960-01 | SMC SPINDLE TUBE ASSEMBLY | 1 | |
30048-01 | 150mm HIGH ACCEL WAFER CHUCK (COUNTER BALANCED) | 1 | |
30048-02 | 125mm HIGH ACCEL WAFER CHUCK (COUNTER BALANCED) | 1 | |
30048-03 | 125mm HIGH ACCEL WAFER CHUCK (NON COUNTER BALANCED) | 1 | |
30048-04 | 100mm HIGH ACCEL WAFER CHUCK (NON COUNTER BALANCED) | 1 | |
COATER (STANDARD) | QUANTITIES ARE PER ASSEMBLY | ||
114-020 | SOLENOID VALVE | 2 | |
114-022 | SOLENOID VALVE | 2 | |
203-062 | AIR CYLINDER, SPINDLE GUIDE PLATE | 1 | |
202-283 | TEFLON O-RING | 1 | |
202-410 | O-RING | 1 | |
17276-01 | KNOB EBR | 1 | |
17530-02 | BEBR NOZZLE, CHISEL POINT | 1 | |
201-007 | SEAL BALL BUSHING 3/8 | 1 | |
201-219 | BEARING LINEAR 3/8 | 2 | |
202-418 | MOVING DISPENSE DRIVE BELT | 1 | |
203-072 | DISPENSE ARM AIR CYLINDER | 1 | |
99-16559-03 | MOVING DISPENSE, HIGH TORQUE STEPPER MTR HARN | 1 | |
99-17216-01 | PIVOTING DISPENSE, AIR CYLINDER HARNESS | 1 | |
99-80158-01 | SINGLE SENSOR PCB | 3 | |
112-005 / 112-005EXL | HIGH SPEED SPINDLE DRIVE MOTOR | 1 | |
112-005EXL | HIGH SPEED SPINDLE DRIVE MOTOR | 1 | |
17-06603-01 | 86/88 SPINDLE TUBE REBUILD KIT | 1 | |
203-7002 | CENTERING DEVICE AIR CYLINDER | 1 | |
201-064 | BALL BUSHING | 2 | |
201-085 | LINEAR BERING SEAL | 2 | |
99-16538-05 | CATCH CUP ASSY W/ PVTG DISP TUB/CCR | 1 | |
203-052 | AIR CYLINDER, 9/16 X 4 STROKE | 1 | |
202-303 | SEAL, O-RING, CHEMRAZ | 3 | |
222-005 | CABLE, 34.25 LG, EYES BOTH ENDS | 1 | |
109-115 | SUBMINITURE SWITCH | 1 | |
109-192 | ACTUATOR, MAG SENSOR, FOR 109-193 | 1 | |
109-192 | MAGNETIC SENSOR | 1 | |
213-139 | VALVE 3 WAY PNEUMATIC TEFLON | 1 | |
206-666 | ELBOW 10-32 X 1/8 TUBE BARB NYLON | 1 | |
99-38846-01 | ASSY, SOLENOID 114-007 | 1 | |
99-38847-1 | ASSY, SOLENOID 114-021 | 1 | |
DEVELOPER (FIXED HEAD) | QUANTITIES ARE PER ASSEMBLY | ||
109-014 | VACUUM SWITCH | 1 | |
114-003 | NOZZLE CLEANOUT SOLENOID | 2 | |
114-020 | SOLENOID VALVE | 1 | |
99-70265-01 | SOLENOID VALVE | 2 | |
99-70265-02 | SOLENOID VALVE | 2 | |
114-006 | VACUUM SOLENOID | 1 | |
109-025 | MAGNETIC REED SWITCH | 1 | |
112-005 / 112-005EXL | HIGH SPEED MOTOR | 1 | |
203-064 | SPLASH SHIELD LIFT CYLINDER | 1 | |
203-067 | SPINDLE LIFT CYLINDER | 1 | |
206-097 | SPRAY RINSE FITTING | 1 | |
207-011 | SPRAY NOZZLE | 2 | |
207-014 | NYLON GASKET | 2 | |
215-021 | TORQUE COUPLER | 1 | |
06734-05 | 3" WAFER CHUCK (IF APPLICABLE) | 1 | |
06734-06 | 4" WAFER CHUCK (IF APPLICABLE) | 1 | |
06734-07 | 5" WAFER CHUCK (IF APPLICABLE) | 1 | |
06734-08 | 6" WAFER CHUCK (IF APPLICABLE) | 1 | |
99-16113-02 | DEVELOPER SPINDLE TUBE | 1 | |
99-80158-01 | SINGLE SENSOR PCB | 4 | |
DEVELOPER (MOVING ARM) | QUANTITIES ARE PER ASSEMBLY | ||
46 | HOLLOW SCREW | 2 | |
109-014 | VACUUM SWITCH | 1 | |
99-70265-01 | SOLENOID VALVE | 4 | |
112-066 | LOW SPEED MOTOR | 1 | |
112-067 / 112-067EXL | HIGH SPEED MOTOR | 1 | |
201-064 | DISPENSE ARM BEARING | 4 | |
201-085 | BERING SEAL | 4 | |
203-074 | SPINDLE LIFT CYLINDER | 1 | |
206-584 | FITTING | 2 | |
206-925 | FITTING | 2 | |
207-024 | FLAT PATTERN SPRAY NOZZLE | 2 | |
207-026 | FLAT PATTERN SPRAY NOZZLE | 2 | |
215-021 | TORQUE COUPLER | 1 | |
216-080 | NYLON HOSE CLAMP | 4 | |
216-081 | NYLON HOSE CLAMP | 4 | |
215-082 | DISPENSE ARM SHAFTS | 2 | |
06734-05 | 3" WAFER CHUCK (IF APPLICABLE) | 1 | |
06734-06 | 4" WAFER CHUCK (IF APPLICABLE) | 1 | |
06734-07 | 5" WAFER CHUCK (IF APPLICABLE) | 1 | |
06734-08 | 6" WAFER CHUCK (IF APPLICABLE) | 1 | |
06820-01 | CATCH CUP GASKET | 1 | |
99-80158-01 | SINGLE SENSOR PCB | 4 | |
99-14416-01 | ELECTRO-MECHANICAL CLUTCH ASSEMBLY | 1 | |
99-16113-03 | SPINDLE TUBE ASSEMBLY | 1 | |
CHILL PLATE | QUANTITIES ARE PER ASSEMBLY | ||
109-014 | VACUUM SWITCH | 1 | |
114-006 | VACUUM SOLENOID | 1 | |
114-002 | 2 WAY SOLENOID VALVE | 1 | |
114-003 | 4 WAY SOLENOID VALVE | 1 | |
16188-01 | HILL PLATE WAFER PIN | 2 | |
ATS ARM DRIVE | QUANTITIES ARE PER ASSEMBLY | ||
112-106 | SILVER GRAPHITE DRIVE MOTOR | 1 | |
202-256 | DRIVE BELT | 1 | |
99-71265-01 | ATS DRIVE PCB | 1 | |
99-80158-01 | SINGLE SENSOR PCB | 2 | |
CTD CART | QUANTITIES ARE PER ASSEMBLY | ||
NOTE: NEW SMC VERSION AVAILABLE | |||
109-064 | BATH WATER LEVEL SWITCH | 1 | |
109-102 | LIQUID LEVEL SWITCH | 1 | |
114-045 | 2 WAY TEFLON VALVE (IF APPLICABLE) | 2 | |
114-041 | 3 WAY SOLENOID VALVE (MD CARTS ONLY) | 2 | |
114-007 | 2 WAY SOLENOID VALVE (IF APPLICABLE) | 2 | |
121-212 | 115 VAC FLOW THRU COOLER (IF APPLICABLE) | 1 | |
209-035 | PRESSURE GAUGE (MD CARTS ONLY) | 1 | |
209-056 | SPRAY FLOWMETER (MD CARTS ONLY) | 1 | |
209-061 | STREAM FLOWMETER (MD CARTS ONLY) | 2 | |
209-091 | PRESSURE GAUGE (IF APPLICABLE) | 1 | |
213-131 | COMBO ON/OFF SUCKBACK VALVE (MD CARTS ONLY) | 1 | |
213-151 | METERING VALVE (IF APPLICABLE) | 2 | |
213-085 | HIGH PRESSURE 2 WAY TEFLON VALVE (MD CARTS ONLY) | 2 | |
217-060 | .2 MICRON DEVELOPER FILTER | 2 | |
219-092 | 115 VAC MAGNETIC DRIVE DEV. PUMP (IF APPLICABLE) | 1 | |
219-093 | 230 VAC MAGNETIC DRIVE DEV. PUMP (IF APPLICABLE) | 1 | |
219-094 | 115 VAC MAGNETIC DRIVE BATH PUMP (IF APPLICABLE) | 1 | |
219-095 | 230 VAC MAGNETIC DRIVE BATH PUMP (IF APPLICABLE) | 1 | |
99-08370-01 | 115 VAC LAUDA IMMERSION CIRCULATOR (IF APPLICABLE) - NEW SMC VERSION AVAILABLE | 1 | |
99-08370-02 | 230 VAC LAUDA IMMERSION CIRCULATOR (IF APPLICABLE) - NEW SMC VERSION AVAILABLE | 1 | |
99-80163-01 | DUAL DEVELOPER INTERFACE PCB (IF APPLICABLE) | 2 | |
SYSTEM SPARES: | |||
102-5388 | LED | 4 | |
103-6051 | LOW SPEED DRIVE TRANSISTOR | 2 | |
103-6384 | HIGH SPEED BRAKE TRANSISTOR | 2 | |
103-11011 | BRUSH DRIVE TRANSISTOR | 2 | |
107-004 | POWER SUPPLY RELAY | 2 | |
109-051 | SNAP SWITCH | 25 | |
109-052 | SNAP SWITCH | 10 | |
109-088 | CARD CAGE POWER SWITCH | 2 | |
110-005 | 28 VOLT LAMP | 5 | |
111-003 | 5 AMP FUSE | 10 | |
111-008 | 3 AMP FUSE | 10 | |
111-010 | 10 AMP FUSE | 10 | |
111-012 | .5 AMP FUSE | 10 | |
114-003 | 2 WAY SOLENOID VALVE WITH E.P. SEALS | 2 | |
114-007 | 2 WAY SOLENOID VALVE WITH KALREZ SEALS | 2 | |
121-204 | WATLOW TEMP. CONTROLLER | 1 | |
124-005 | 5 BDC REGULATOR | 2 | |
200-003 | TEFLON TAPE | 2 | |
200-014 | LOCTITE 242 | 1 | |
200-056 | LOCTITE 222 | 1 | |
200-310 | LUBRICANT | 2 | |
18810-14 | OVERLAY 8826SMC/36 (IF APPLICABLE) | 1 | |
18810-11 | OVERLAY 8838 (IF APPLICABLE) | 1 | |
18810-04 | OVERLAY 8832 CTD/36 (IF APPLICABLE) | 1 | |
18810-10 | OVERLAY 8832 CTD MD/36 (IF APPLICABLE) | 1 | |
99-71103-01 | CPU PCB (REPLACES SVG 99-80103) | 1 | |
99-71122-01 | TRACK I/O PCB (FOR HPO/VP STAND ALONE CARD CAGES) | 1 | |
99-71122-03 | TRACK I/O PCB (FOR COATER AND DEVELOPER CARD CAGES) | 1 | |
99-71122-03 | TRACK I/O PCB (MD DEVELOPERS ONLY) | 1 | |
99-16105-01 | PCB INTERCONNECT HARNESS | 1 | |
99-16091-01 | ATS ARM COMMUNICATION CABLE | 1 | |
99-80146-01 | VAC DELAY PCB | 1 |