MERCURY+SP
Automated Batch Spray Clean

M+SP

Introducing MERCURY+™SP

MERCURY™+SP incorporates advanced loading automation around our industry-favorite MERCURY+ system for production proven high throughput spray batch clean, etch & resist strip applications. All manual loading functions of the MERCURY system are completely automated with this upgrade, capable of integrating with your OHT/automated loading requirements.

MERCURY+ SP is perfect for fabs looking for automated high throughput wet cleaning solutions, while providing low cost-of ownership, and easy size change capabilities. SHELLBACK is the product line owner of the iconic FSI MERCURYTM /  MERCURYTM+ product line with systems, upgrades, parts and technical support worldwide.

Features

  • Cassette loading & storage
  • In-situ wafer transfer
  • Optical wafer count for balancing
  • Video monitoring of cassette placement
  • Two full process lot capacity
  • SECS/GEM factory host integration

MERCURY+SP Batch Spray System

Automated Hi Throughput / Low CoO
Clean . Etch . Resist Strip

MERCURY+ Semi-Automated
MERCURY Upgrades
Spin Rinse Dryer
FSI MERCURY Parts
MERCURY+ Parts

Process Applications

  • SPM, dHF, SC1, SC2 cleans
  • Post-etch and post-ash cleans
  • Aqueous photoresist strip applications
  • Wet etch/strip of metal films for silicide
  • BEOL, Post cleans using DSP, DSP+

Benefits

  • High throughput batch cleaning
  • Reliable, low cost of ownership
  • Proven platform for 100mm to 200mm
  • Flexible chemistries
Mercury+ Acquisition Press Release

MERCURY+ SP comes with the latest software enhancements to keep your system running for years to come.

CONTACT SHELLBACK

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