SEMITOOL TORRENT
Spray Solvent Tool
SST
TORRENT, our latest SEMITOOL Spray Solvent Tool, is the platform of choice for solvent applications. We are the product line owner for SEMITOOL batch systems since 2012 and designed TORRENT utilizing industry proven SEMTOOL batch spray technology.
With the latest software enhancements and compact, maintenance-friendly system configurations for optimal performance, TORRENT delivers repeatable, uniform process results safely and at a low CoO. The latest in the line of legendary SEMITOOL Spray Solvent Tools, TORRENT is available in 25 or 50 wafer configurations.
SEMITOOL TORRENT Spray Solvent Tool (SST)
Spray Batch System
Process Applications
- Polymer removal
- Resist strip
- Post etch residue removal
- Solvent cleans
- Post-Dice clean
- Metal Lift-off
- Flux removal
Cost of Ownership
- Low exhaust and facilities requirements
- Low chemical consumption
- Low DIW consumption
- Low waste
Our SEMITOOL TORRENT Spray Solvent Tool Features:
Chamber
- Enhanced Spray Technology
- On-Axis design
- Uniform boundary layer
- Uniform, repeatable process
- Flexible process
- High throughput
- Single chamber 25 or 50 wafer loads
- Dual chamber 25 or 50 wafer loads
- End point detection available
- Sealed chamber isolates operator from chemistry
- Safe operation
Tanks
- Single chamber up to 4 tanks (40l) 6 tanks (20l)
- Dual chamber up to 8 tanks
- 20 liter or 40 liter tanks available
- Chemical concentration monitoring available
- Heated tanks or inline heaters available
- Fill Vessels available for tank spiking
Software
- Windows 10
- Web based HMI
- Recipe Editor: Excel View & Remote upload
- SEC/GEM
- Smart Parts: Advanced predictive analytics