Search
Close this search box.

SEMITOOL TORRENT
HF Vapor Tool

HFV

The SEMITOOL HF Vapor platform delivers SHELLBACK patented HF Vapor process.  The on-axis, HDPE, process chamber can accommodate up to 25 wafers in a vertical orientation.

Stiction-Free MEMS Spring Release Process

SEMITOOL HF Vapor Tool (HFV)
Batch Spray System

Process Applications

Cost of Ownership

Features:

Chamber

Software

CONTACT SHELLBACK

Scroll to Top