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SEMITOOL TORRENTsp Automated Batch Spray

SP

The Torrentsp is well-suited for those manufacturers who require an automated wet processing mini-environment in a compact footprint, including power semiconductor, CMOS IC, Advanced Packaging, MEMS, and LED applicationsThe main drivers for automation at 200mm and above is to reduce manual operator intervention and dependency. This provides ergonomic relief to operators, fulfills the automation requirements of SMIF and FOUP operations, and has the added advantage of automated wafer control. 

Semitool 2 Chamber Torrent SP
Semitool 4 Chamber Torrent SP

SEMITOOL TORRENTsp
Automated Batch Spray System

All the featrues of our industry-favorite batch spray systems along with front end FOUP / SMIF auto loading automation for high speed applications up to 300mm. 

Process Applications

Clean

Etch

Resist Strip

Specifications

Features:

Chamber

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