FSI MERCURY & MERCURY+ Upgrades

Extend Equipment Life

Address Obsolescence, Add Features for Expanded Use

SHELLBACK acquired the FSI MERCURYTM / MERCURYTM+ product line in 2023. We now offer critical upgrades for FSI MERCURY and MERCURY+ systems to extend equipment life and usefulness. Our solutions include a full control system upgrade for FSI MERCURY users that addresses key obsolescence issues.

MERCURY+ Systems
FSI MERCURY Parts
MERCURY+ Parts

Control System Upgrade for Aging FSI MERCURY Tools

Addresses System Obsolescence!

  • Available exclusvely for FSI MERCURY system users – upgrades system to MERCURY+ controller, addressing obsolescence and extending system life
  • Includes new hardware and software
  • CPU, I/O boards, pneumatic pack, touchscreen, motor control
  • Windows 10, with modern user interface
  • Supports on-board data logging and analysis
  • USB replaces floppy drive
  • 320 GB Hard Drive
  • Eliminates obsolete CPU, I/O, and pneumatics
  • Tool audit and registration of included

MERCURY+ Process Upgrades

Upgrade Key Benefit
FlashClean™ Improved particle performance. Reduced on-wafer defects (validated by customer data)
PR Strip 120°C SPM Configuration Single chamber N2 controlled environment. Flexibility for dry in/dry out etch, PR strip & Post Ash clean in one system
Wafer Size Conversion Versatility to run different wafer sizes in one piece of equipment
Dual Process Exhaust Improved process & particle performance by reducing ammonium chloride build-up from RCA chemistries
DI Heater Flow through quartz tube DI heater provides superior control accuracy & particle performance with high purity, crevice-free fluid path

MERCURY+ Reliability & Maintenance Upgrades

Upgrade Key Benefit
DI Rinse/N2 Purge Flow Monitoring Improves process control, generates tool alarm condition for loss of DI rinse or N2 flow. Data logging option available.
DI Water Booster Pump Magnetically levitated unit provides superior boosting capacity to previous versions and incudes built-in pressure transducer and PID control loop
DI Heater Flow through quartz tube DI heater provides superior control accuracy & particle performance with high purity, crevice-free fluid path
Chemical Canister Auto Fill The Autofill option allows automatic refilling of chemical canisters from customer bulk supply
Lid Shock Absorber Prevents cracks in MERCURY™+ cabinet due to lid open/close set up

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