Semitool Spin Rinse Dryer (SRD)

SHELLBACK introduces the next-generation Spin Rinse Dryer (SRD) with advanced controls that enhance ease-of-use, improves monitoring and management capabilities, and reduces operating costs. The Semitool IP was acquired in 2011 and SHELLBACK has continually added quality and reliability upgrades to its best-in-class SRD product the world standard for high-performance cleaning, rinsing, and drying with more than 25,000 units currently in use. A major engineering design upgrade of its Semitool Spin Rinse Dryer, a platform for removing residual chemicals from semiconductor substrates and other materials such as optical lenses. The new SRD800 series features several upgrades, including a robust Windows OS, advanced automation, an intuitive GUI, and patent-pending SmartParts™uptime technology. Along with improved ergonomic functionality, the many system upgrades enhance management capabilities and gives users the ability to track and control operations in real time in order to significantly reduce overall cost of ownership.

Semitool SRD800 Series

Complete chemical and residue cleaning optimized for low particles and protection of substrates with innovative low cost of ownership.


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