Semitool Storm II and 300
SHELLBACK introduces the Semitool Storm II and 300, the industry’s first batch centrifugal spray cleaning tool for boxes, cassettes, FOUPs and SMIF Pods. The Semitool IP was acquired in 2011 and SHELLBACK manufactures the Semitool Storm II high capacity cleaning system designed to clean cassette box or carriers with sizes up to 200mm. The Storm 300 cleans and dries eight 300mm FOUP and eight FOUP doors in less than 30 minute, and cleans and dries up to 30 cassettes or FOUPs/FOSBs in an hour.
Semitool Storm Centrifugal Spray Cleaning Tool
- Rotates the product through a DI water spray delivered on both the front and the back for complete coverage
- Rotation can be reversed to ensure full spray penetration of product
- Drying is accomplished with centrifugal acceleration coupled with ULPA filtered and heated air
- Optional surfactant delivery system can enhance cleaning efficiency
- Additional door option adds access from two sides
- Electropolished stainless steel chamber and rotor
- Eight PEEK DI spray manifolds with multiple PVDF nozzles
- Eight stainless steel CDA/N2 spray manifold with multiple PVDF nozzles
- Wetted DI line materials: Teflon®, PVDF, PEEK
- Anti-static system for drying cycle
- Brushless DC motor for reliable operation, braking, and positioning of rotor
- PLC control system with Window 10 OS
- Storm II for 200mm and below
- Storm 300 for 300mm and 200mm