Semitool Torrent Spray Solvent Tool (SST)
The Torrent Spray Solvent Tool is the platform of choice for solvent applications. Avialable in 25 or 50 wafer configurations, the Torrent platform delivers repeatable, uniform process results safely and at a low CoO.
Semitool Torrent Spray Solvent Tool (SST) Spray Batch System
Process Applications:
- Polymer removal
- Resist strip
- Post etch residue removal
- Solvent cleans
- Post-Dice clean
- Metal Lift-off
- Flux removal
Features:
Chamber
- Enhanced Spray Technology
- On-Axis design
- Uniform boundary layer
- Uniform, repeatable process
- Flexible process
- High throughput
- Single chamber 25 or 50 wafer loads
- Dual chamber 25 or 50 wafer loads
- Sealed chamber isolates operator from chemistry
- Safe operation
Tanks
- Single chamber up to 4 tanks (40l) 6 tanks (20l)
- Dual chamber up to 8 tanks
- 20 liter or 40 liter tanks available
- Chemical concentration monitoring available
- Heated tanks or inline heaters available
- Fill Vessels available for tank spiking
Software
- Windows 10
- Web based HMI
- Recipe Editor: Excel View & Remote upload
- SEC/GEM
- Smart Parts: Advanced predictive analytics
Cost of Ownership
- Low exhaust and facilities requirements
- Low chemical consumption
- Low DIW consumption
- Low waste