Semitool Torrentsp Automated Batch Spray
The Torrentsp, built based on the Semitool Cintillio platform, is an automated batch system that integrates industrial automation. This next evolution provides automated wafer handling technology and replaces the Semitool Spectrum and Magnum platforms which were acquired in 2014. It incorporates all of the excellent features of the original Semitool Cintillio and adds the advantages of industrial automation on the front-end. This allows SHELLBACK to move away from the custom-design philosophy used in the Spectrum and Magnum platforms. The use of common electro-mechanical components for both the process and automation modules ensures supply chain continuity for end-users. In addition, the use of Cintillio process module ensures existing Spectrum and Magnum users have a seamless process transfer from these older platforms. The main drivers for automation at 200mm and above is to reduce manual operator intervention and dependency. This provides ergonomic relief to operators, fulfills the automation requirements of SMIF and FOUP operations, and has the added advantage of automated wafer control. The Torrentsp handling solution is well-suited for those manufacturers who require an automated wet processing mini-environment in a compact footprint, including power semiconductor, CMOS IC, Advanced Packaging, MEMS, and LED applications.

Specifications:
- Eight Brooks Versaport 2200 Loadports with wafer mapping
- H-Square end effector for unloading and loading of loadports
- Dedicated linear robot for loading and unloading loadports and Guardian Carrier
- Three or four 25-wafer guardian carriers or three or four 50-wafer guardian carriers
- Dedicated load and unload station for Guardian Carrier
- Staubli 6-Axis robot for dedicated loading and unloading of Guardian carriers in and out of Chambers
- Class 1 Mini Environment
- ULPA Filters
- Air Ionizer
- LED lighting
Semitool Torrentsp Three or Four Chamber Automatic Spray Batch System
Process Applications:
Clean
- RCA cleans
- Flux cleans
- Solvent polymer cleans
- Ozone post-DRIE clean
- Polymer removal
- Ozone Post-Ash cleans
- Fluorozone clean
- Post-Dice cleans
Etch
- Metal etch with advanced EPD
- Sequential UBM etch
- Silicon etch
- Oxide etch
- Glass etch
Resist Strip
- Hydrozone resist strip
- Hydrozone+ resist strip
- Solvent resist strip
- Sequential etch resist strip