Semitool Torrentsp Automated Batch Spray

The Torrentsp, built based on the Semitool Cintillio platform, is an automated batch system that integrates industrial automation. This next evolution provides automated wafer handling technology and replaces the Semitool Spectrum and Magnum platforms which were acquired in 2014. It incorporates all of the excellent features of the original Semitool Cintillio and adds the advantages of industrial automation on the front-end. This allows SHELLBACK to move away from the custom-design philosophy used in the Spectrum and Magnum platforms. The use of common electro-mechanical components for both the process and automation modules ensures supply chain continuity for end-users. In addition, the use of Cintillio process module ensures existing Spectrum and Magnum users have a seamless process transfer from these older platforms. The main drivers for automation at 200mm and above is to reduce manual operator intervention and dependency. This provides ergonomic relief to operators, fulfills the automation requirements of SMIF and FOUP operations, and has the added advantage of automated wafer control. The Torrentsp handling solution is well-suited for those manufacturers who require an automated wet processing mini-environment in a compact footprint, including power semiconductor, CMOS IC, Advanced Packaging, MEMS, and LED applications.

Semitool Torrentsp Two Chamber Automatic Spray Batch System

Process Applications:

Clean

Etch

Resist Strip

Features:

Specifications:

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